Description: The rapid development of microelectromechanical systems (MEMS) technologies in recent years has provided a high degree of spatial miniaturization and integration of electromechanical components, which enable integrated sensing and control in manufacturing. In this paper we presented an overview of the state of the art of micro machined microsensors for the measurement of mechanical signals in the manufacturing industry for automobiles, manufacturing, medical equipment, environment, robotics, food and other consumer products.
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